Xrim-FC-300

Xtirm-FC-300 Overview

Xtirm-FC-300 概览

Business Model

技术实力雄厚，专业的营销设计团队

Strengthen service. sales & marketing, design expertise

质量认证

Manufacture cleaners under ISO 9001  quality control IS09001

操作简便、维护成本低

Reduce overhead costs and more efficient operations

交货周期短，技术支持迅捷

Provide shorter lead-time and improvedtechnical support

半导体行业客户认可度高

Highly focused on repeat orders from existing semi customers

Xtrim-FC-300 介绍

Xtrim-FC-300 introduction

在清洗机行业超25年经验

Over 25 years of experience in cleaning equipment business

在上海，苏州有完善的服务和销售团队

Full sales and warranty support in Shanghai

自主研发设计，生产、服务，可用于片盒、FOUP、光罩盒清洗

Designed,manufactured and serviced box/-FOUP/FOSB/MASKPOD cleaners

Features

3rd Generation process cleaner for 50mm - 300m wafer handing products

针对2-12寸晶圆的第三代清洗设备

High-purity materials, PP, PVDF 316 suS, etc

适用于各种材质盒子，包括PP、PVD......

Front load/unload, or optional front load & back unload ftor bulk mounting

前载/前卸、前载/后卸等多种设计模式

Standard heated blower drying usingfab air

标准厂务热空气干量

Optional heated CDAN2 drving

热CDA、N2干燥可选

Standard ambient DIW cleaning

标准DIW清洗容器

Small footprint ideal for cleanroom

无尘室最小占地设计

Maximum throughput in the industry

产能最大化设计

Outstanding local support and spare parts avalilbility

技术支持实力雄厚，备件齐全

Lowestmaintenance,high MTBF &uptime

维护成本低，故障率低

-Manually load shipping boxes, Mask Pod or other wafer handling products in the custom-designed racks in the machine

手动取放盒子，可根据客户要求设计方案

-Washing, rinsing and drving are fuilly automated when the operator verifies that the parts are securely loaded on all four racks and the machine door closed properly, before pressing the GO button on thetouch screen

自动化洗烘，键启动-

All spinning speeds and directions will be automatically controled through the HMI

人机界面控制参数